SILICON CARBIDE (SIC)
Durable and High Purity Silicon Carbide
The ring-type component and cathodes, for Etch processing, have been replaced with SiC which has significantly improved the lifetime as well as reduce the cost. Its anti-corrosiveness and high thermal conductivity characteristics have made SiC one of the most promising materials in the semiconductor industry.
The product lists consists of: Upper Ring, Baffle, PEC, Holder Cap