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SILICON CARBIDE (SIC)

Durable and High Purity Silicon Carbide

The ring-type component and cathodes, for Etch processing, have been replaced with SiC which has significantly improved the lifetime as well as reduce the cost.  Its anti-corrosiveness and high thermal conductivity characteristics have made SiC one of the most promising materials in the semiconductor industry.

The product lists consists of: Upper Ring, Baffle, PEC, Holder Cap