ESC PROCESSING

Before and After Comparison

As part of our quality assessment for ESC's, we make sure the performance is up to par as well. We test and make sure that the outcome is perfect to the customer's liking.

New ESCs and Refurbishments are tested for:

Ultra Sonic imaging of plate and bonding

Flatness

Dimple Height

Dimension

He Leak Rate

Withstanding Voltage

Chucking/Dechucking

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ESC REPAIR PROCESS

The ESC repair process requires many steps to ensure quality control while making sure that the product is in good hands when leaving our facility. We inspect the product the moment it enters our facility until when it leaves. We broadened the process to 5 simple steps to provide a general idea of how it is handled in our facility.

1. PRE-INSPECTION

As soon as the product enters our facility, it is pre-inspected to see what the condition of the ESC is at while performing diagnostics to calculate what the problem is.