ELECTROSTATIC CHUCKS

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CERAMIC PLATES ESC

Yerico can refurbish and characterize numerous models of ceramic plate ESCs. Some of the refurbishment processes are, surface treatment, plate de-bond and rebound, body re-anodization, E-band installation, and new plate installation for some models. Some, but not all characterizations are ultrasonic bonding and heater layer inspections, chucking and de-chucking testing, under vaccum heat mapping, He leak-rate testing, and though body inspection for compromised anodization.

ANODIZED ESC

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POLYIMIDE ESC

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619 Mogonye Ln, Elgin, TX 78621

(512) 285-3444

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